SiH4 Leakage Exercise in Fab

人員至現場警戒 Staff on guard on the scene.
人員至ERC室拿取設備 ERT members take equipment from the ERC.
值班主管確認狀況 Shift supervisor  identify the situation.
引導人員會同值班主管 ERT guides and shift supervisor.
應變人員進行應變器材著裝 ERT members put on the emergency response equipments.
現場量測洩漏濃度 On-site measurement of SiH4 concentration.
廠務配合設備關閉VMB Facility Unit  shuts down VMB based on equipment unit.